Electronic circuits

Tungsten hexafluoride

Substance identification

Chemical formula: WF6

Other name: Tungsten fluoride (VI)

CAS# 7783-82-6

PubChem ID: 522684

Purity: 99%

Propriétés physiques et applications

Weight: 297,830 g/mol

Appearance: colourless gas

Density: 4.56 g/cm3

Melting point: 2.3 °c

Boiling point: 17.1 °c

Applications: WF6 is used most often for the production of certain electronic circuits. During vapour phase chemical deposition processes it produces a layer of tungsten metal or low resistivity tungsten silicide that allows interconnections.