Semiconductors, photovoltaics
- Silicon etching and cleaning
- XeF2
- N2F2
- CVD precursors
- Fluorides of transition elements
- Titanium tetrafluoride
- Molybdenum hexafluoride
- Rhenium hexafluoride
- Fluorides of block p elements:
- Sulphur hexafluoride
- Arsenic pentafluoride
- Germanium tetrafluoride
- Fluorides of transition elements
- Activation of deposition media (functionalization)
- Passivation of metal surfaces against corrosion
- Aluminum
- Steel
- Nickel alloys (Hastelloy)