Semiconductors, photovoltaics

  • Silicon etching and cleaning
    • XeF2
    • N2F2
  • CVD precursors
    • Fluorides of transition elements
      • Titanium tetrafluoride
      • Molybdenum hexafluoride
      • Rhenium hexafluoride
    • Fluorides of block p elements:
      • Sulphur hexafluoride
      • Arsenic pentafluoride
      • Germanium tetrafluoride
  • Activation of deposition media (functionalization)
  • Passivation of metal surfaces against corrosion
    • Aluminum
    • Steel
    • Nickel alloys (Hastelloy)